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IMA workshop: Multiscale Models for Surface Evolution and Reacting Flows
Organizers:
Leonard Borucki
Motorola
borucki@act.sps.mot.com
Christian Ringhofer
Arizona State University
Department of Mathematics
ringhofer@asu.edu
http://math.la.asu.edu/~chris/
Multilayered compound materials with microscopically structured surfaces play a key role in semiconductor manufacturing. These structures are produced by a variety of processes, such as the deposition of thin films, etching techniques and controlled crystal growth.
The topic of this workshop is the integration of different models describing these processes on different spatial and temporal scales. Well-developed models exist for each stage of the above processes on the microscopic-atomistic and macroscopic-fluid scale. However, in order to describe completely the whole process, it is necessary to link these models via an appropriate mathematical description of the transition regimes. This involves a mixture of boundary layer and homogenization techniques as well as a mathematical analysis of the transition process from the atomistic description of the early stages of thin film growth to the evolution of continuous films. Computational issues covered by this workshop will be the deterministic and probabilistic representation of film surfaces and numerical methods for the transitional models.
| Monday | Tuesday |
| MONDAY,
JUNE 5 All talks are in Lecture Hall EE/CS 3-180 unless otherwise noted. |
||
|---|---|---|
| 8:30 am | Coffee and Registration |
Reception Room EE/CS 3-176 |
| 9:10 am | Willard Miller, Fred Dulles, and Christian Ringhofer | Introduction |
| 9:30 am | Leonard
Borucki Motorola |
Taking on the Multiscale Challenge Material
from talk pdf
powerpoint |
| 10:30 am | Break | Reception Room EE/CS 3-176 |
| 11:00 am-12:00 pm | Avner
Friedman University of Minnesota |
Multiscale Problems in Semiconductor Processing |
| 2:00-3:00 pm | James
Sethian University of Californaia-Berkeley |
Interface Simulations in Semiconductor Manufacturing |
| 4:00 pm | IMA Tea | IMA East, 400 Lind Hall A variety of appetizers and beverages will be served. |
| TUESDAY,
JUNE 6 All talks are in Lecture Hall EE/CS 3-180 unless otherwise noted. |
||
| 9:15 am | Coffee | Reception Room EE/CS 3-176 |
| 9:30 am | Timothy
S. Cale Rensselaer Polytechnic Institute |
Integrated Multiscale Process Simulation in Microelectronics |
| 10:30 am | Break | Reception Room EE/CS 3-176 |
| 11:00 am-12:00 pm | Darrin
M. York University of Minnesota |
Multi-scale Quantum Models for Biological Systems |
| 2:00-3:00 pm | Peter
O'Sullivan Lucent Technologies |
Feature-scale to Wafer-scale Modeling of Physical Vapor Deposition Material from talk pdf powerpoint |
| WEDNESDAY,
JUNE 7 All talks are in Lecture Hall EE/CS 3-180 unless otherwise noted. |
||
| 9:15 am | Coffee | Reception Room EE/CS 3-176 |
| 9:30 am | John
King University of Nottingham |
Homogeneous and Heterogeneous Models for Silicon Oxidation |
| 10:30 am | Break | Reception Room EE/CS 3-176 |
| 11:00 am-12:00 pm | Dionisios
G. Vlachos University of Massachusetts |
Multiscale Models for Chemical Reactors |
| 2:00-3:00 pm | Stanley
Osher University of California-Los Angeles |
Level Set Based Analysis and Fast Algorithms for Surface Evolution |
| THURSDAY,
JUNE 8 All talks are in Lecture Hall EE/CS 3-180 unless otherwise noted. |
||
| 9:15 am | Coffee | Reception Room EE/CS 3-176 |
| 9:30 am | Christian
Ratsch University of California - Los Angeles |
Modeling Epitaxial Growth Using the Level-Set Method |
| 10:30 am | Break | Reception Room EE/CS 3-176 |
| 11:00 am-12:00 pm | Matthias
K. Gobbert University of Maryland, Baltimore County |
A Homogenization Technique for the Boltzmann Equation for Low Pressure Chemical Vapor Deposition |
| 2:00 pm | Matthew
Laudon Motorola |
Multiscale Modeling of Boron Diffusion in Silicon: Ab Initio to Continuum |
| 3:00 pm | Break | Reception Room EE/CS 3-176 |
| 3:30 pm | Victor
Roytburd
Renselaer Polytechnic Institute |
Front Dynamics for a Stefan Type Model with Nonlinear Surface Kinetics |
| 4:00-4:30 pm | Jean-Pierre
Boon Université Libre de Bruxelles |
Langton's Ant: a Toy Model for Low Dimensional Reactive Rrocesses |
| 5:00 pm | Workshop
Picnic
Sawatdee Restaurant |
Vincent Hall Courtyard. This picnic will be both for the workshop and a celebration of the conclusion of the 1999-2000 annual program on Reactive Flow and Transport Phenomena. Food will be supplied by Sawatdee, a local Thai restaurant. IMA staff and postdocs as well as workshop participants are encourged to attend and help mark the conclusion of another successful program. |
| FRIDAY,
JUNE 9 All talks are in Lecture Hall EE/CS 3-180 unless otherwise noted. |
||
| 9:15 am | Coffee | Reception Room EE/CS 3-176 |
| 9:30 am | J.
Dalla Torre
Bell Labs, Lucent Technologies |
Monte Carlo Simulations of Polycrystalline Thin Films Deposited by PVD |
| 10:00 am | Peter
Mucha Massachusetts Institute of Technology |
Fluctuations and Structures in Dilute Sedimentation Material from talk pdf postscript |
| 10:30 am | Break | Reception Room EE/CS 3-176 |
| 11:00 am | Thierry
Goudon Université Nice-Sophia Antipolis |
|
| 11:30 am | Markos
A. Katsoulakis University of Massachusetts |
A Multiscale Approach to Cluster Growth Problems Material from talk pdf postscript |
| 12:00-12:30 pm | David
Levermore University of Arizona |
Transition Regimes for Linear Kinetic Equations |
| Monday | Tuesday |
List of Confirmed Participants
as of 6/5/2000| Name | Department | Affiliation |
|---|---|---|
| Jean-Pierre Boon | Physique | Universite Libre de Bruxelles |
| Len Borucki |  |
Motorola |
| Timothy S. Cale | Chemical Engineering | Rensselaer Polytechnic Institute |
| Larry Carson | SEMS Technology Center | 3M |
| Jacques Dalla Torre | |
Bell Laboratories |
| Fred Dulles | |
Institute for Mathematics and its Applications |
| Avner Friedman | MCIM | University of Minnesota |
| Nasr M. Ghoniem | Engineering | UCLA |
| Matthias K. Gobbert | Mathematics & Statistics | University of Maryland, Baltimore County |
| Markos A. Katsoulakis | Mathematics and Statistics | University of Massachusetts |
| John King | Theoretical Mechanics | University of Nottingham |
| Matthew Laudon | |
Motorola |
| David Levermore | Mathematics | University of Arizona |
| Willard Miller | |
Institute for Mathematics and its Applications |
| Peter Mucha | Mathematics | Massachusetts Institute of Technology |
| Peter O'Sullivan | Bell Labs | Lucent Technologies |
| Stanley Osher | Mathematics | UCLA |
| Christian Ratsch | Mathematics | UCLA |
| Fernando Reitich | Mathematics | University of Minnesota |
| Christian Ringhofer | Mathematics | Arizona State University |
| Alric Rothmayer | Aerospace Engineering & Engineering Mechanics | Iowa State University |
| Victor Roytburd | Mathematics | Rensselaer Polytechnic Institute |
| Fadil Santosa | MCIM | IMA & Minnesota Center for Industrial Math |
| James Sethian | Mathematics | University of California-Berkeley |
| Marshall Slemrod | Mathematics | University of Wisconsin |
| Lev Truskinovsky | Aerospace Engineering & Mechanics | University of Minnesota |
| Dion G. Vlachos | Chemical Engineering | University of Massachusetts |
| Darrin York | Chemistry | University of Minnesota |
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